Efficiently measuring MEMS right on the wafer
Wafer-level testing prior to separating the chips allows the sorting-out of bad dies in an early stage of the production process, which helps significantly to keep MEMS production costs low while maintaining high yield and quality levels. While electrical test procedures are standard here, certain tasks are necessary to verify directly the mechanical function, typically by optical measurement.
With Polytec solutions and the MSA Micro System Analyzer product line integrated into virtually all commercially available wafer probes, the comprehensive and reliable testing begins. By combining a (semi)-automatic probe station with a microscope-based scanning laser vibrometer, efficiently and quickly measure the dynamic behavior of MEMS right on the wafer. Achieve higher throughput and use it as key tool for monitoring the production process.
Time domain of switching behavior of RF switches
Time domain measurement of RF-MEMS switches on wafer level
Microstructure characterization
Related products and services
MSA-600 Micro System Analyzer
The all-in-one optical measurement solution for static and dynamic 3D characterization of MEMS and microstructures- now for up to 8 GHz! The MSA-600 enhances microsystem development and quality inspections - also allowing testing on wafer-level when integrated into commercially available probe stations.
MSA-100-3D Micro System Analyzer
The 3D Micro System Analyzer records vibration components in all three spatial directions at once. The optical measurement system enables high-resolution 3D vibration analysis from DC up to 25 MHz with amplitude resolutions in the sub-picometer range, for both in-plane and out-of-plane vibration components.
MSA-060 Micro System Analyzer
Use the MSA-060 for entering the world of microsystem analysis. Record and visualize vibrations and dynamics of small components and microsystems with laser precision over an entire surface from DC to 24 MHz. Micro System Analyzers use measurement lasers, revealing the true dynamics of small components in a completely non-contact and non-invasive way.
MSA-650 IRIS Micro System Analyzer
The innovative and patented MSA-650 IRIS Micro System Analyzer with IR capability allows for measuring true MEMS dynamics up to 25 MHz by characterizing both in-plane and out-of-plane motions through silicon encapsulation without contact, without need for preparing nor decapping the device.
MSA IRIS measurement service
This brand new, patented measurement technology allows for comprehensive and representative analysis of Si encapsulated MEMS, measuring dynamics right through silicon caps. Our PolyXperts are looking forward to receiving your capped MEMS samples for modal testing, feasibility studies and consulting throughout all phases from development over prototyping to manufacturing of your encapsulated microstructures.
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