Contactlessly characterizing SAWs
As surface acoustic wave (SAW) filters are electronic components that work through surface acoustic waves they are in fact mechanical filters. Due to their superior properties, they are an integral part of high-frequency applications such as mobile telephony. Optimization of the SAW surface’s micro-acoustic properties is one of the key tasks involved in developing new SAW components.
Due to the high frequencies, short acoustic path lengths and small vibration amplitudes, the measurement and visualization of surface waves places particular demands on measuring technology. Using a laser vibrometer is one of the few solutions available for measuring vibration on such systems.
Polytec’s laser Doppler vibrometers enable you to conduct non-contact characterization operations across all frequencies, even when faced with broadband excitation. The deflection shapes are visualized in an impressive way. You can even examine transients and relaxation behaviour. Key results are determining properties such as the filter characteristics and performance losses (leakage).
Testing SAW at development stage at high frequencies
In addition to their use as electronic filters, SAWs play a key role in microfluidic applications too. In this regard, SAWs are used for targeted droplet manipulation of biomaterials. When such lab-on-a-chip components are being developed, the surface dynamics are examined with high-frequency vibrometers like from the Polytec MSA Micro System Analyzer series due to their non-contact optical measurement, the wide frequency bandwidth and the high resolution.
Microstructure characterization
Related products and service
MSA-600 Micro System Analyzer
The all-in-one optical measurement solution for static and dynamic 3D characterization of MEMS and microstructures- now for up to 8 GHz! The MSA-600 enhances microsystem development and quality inspections - also allowing testing on wafer-level when integrated into commercially available probe stations.
MSA-100-3D Micro System Analyzer
The 3D Micro System Analyzer records vibration components in all three spatial directions at once. The optical measurement system enables high-resolution 3D vibration analysis from DC up to 25 MHz with amplitude resolutions in the sub-picometer range, for both in-plane and out-of-plane vibration components.
MSA-060 Micro System Analyzer
Use the MSA-060 for entering the world of microsystem analysis. Record and visualize vibrations and dynamics of small components and microsystems with laser precision over an entire surface from DC to 24 MHz. Micro System Analyzers use measurement lasers, revealing the true dynamics of small components in a completely non-contact and non-invasive way.
MSA-650 IRIS Micro System Analyzer
The innovative and patented MSA-650 IRIS Micro System Analyzer with IR capability allows for measuring true MEMS dynamics up to 25 MHz by characterizing both in-plane and out-of-plane motions through silicon encapsulation without contact, without need for preparing nor decapping the device.
MSA IRIS measurement service
This brand new, patented measurement technology allows for comprehensive and representative analysis of Si encapsulated MEMS, measuring dynamics right through silicon caps. Our PolyXperts are looking forward to receiving your capped MEMS samples for modal testing, feasibility studies and consulting throughout all phases from development over prototyping to manufacturing of your encapsulated microstructures.
Talk to our experts
Our experts are ready to support your projects with tailored measurement solutions or support you in measuring what matters — get in touch with us today.