MEMS prototype testing & prototype verification for process optimization
MEMS prototype testing and the verification of MEMS performance, whether in capped or uncapped MEMS devices is the core project step in the development of any new MEMS (microelectromechanical system. New MEMS devices always require a new production process, unlike with pure semiconductor devices. Process recipes and modules have to be revised at the very least, since at present you still can’t fall back on standard recipes for new micromechanical components, as is otherwise customary in semiconductor development.
Both the system design and an optimized process design are essential if a structural element determined primarily by mechanical properties is to work properly. MEMS prototype testing and MEMS prototype verification thus not only enables the design to be confirmed, but allows for affirmation of the manufacturing process, too. In order to determine unexpected mechanical behaviour and model deviations, the powerful optical measurement by laser vibrometry often is the method of choice.
Prototype testing of CMOS / MEMS co-integrated flow microsensor
Due to its high frequency bandwidth, high lateral resolution and excellent amplitude resolution, Polytec laser vibrometers are reliable measurement tools for reliable determination of the MEMS modal properties such as MEMS transfer functions, MEMS resonance frequencies, damping and deflection shapes. The topographical analysis of MEMS as one part of MEMS prototype testing is also important for component development and process optimization. Surface measurement data such as step heights and other form parameters provide valuable information about current process parameters, leading to a reliable quality control of the MEMS manufacturing process.
The figure illustrates the areal characterization of the topography of a CMOS / MEMS co-integrated flow microsensor carried out using the surface topography option of the MSA Micro System Analyzer from Polytec. The flow microsensor had been realized using silicon-on-insulator (SOI) technology.
Prototype testing and microstructure characterization
Related products and service
MSA-600 Micro System Analyzer
The all-in-one optical measurement solution for static and dynamic 3D characterization of MEMS and microstructures- now for up to 8 GHz! The MSA-600 enhances microsystem development and quality inspections - also allowing testing on wafer-level when integrated into commercially available probe stations.
MSA-100-3D Micro System Analyzer
The 3D Micro System Analyzer records vibration components in all three spatial directions at once. The optical measurement system enables high-resolution 3D vibration analysis from DC up to 25 MHz with amplitude resolutions in the sub-picometer range, for both in-plane and out-of-plane vibration components.
MSA-060 Micro System Analyzer
Use the MSA-060 for entering the world of microsystem analysis. Record and visualize vibrations and dynamics of small components and microsystems with laser precision over an entire surface from DC to 24 MHz. Micro System Analyzers use measurement lasers, revealing the true dynamics of small components in a completely non-contact and non-invasive way.
MSA-650 IRIS Micro System Analyzer
The innovative and patented MSA-650 IRIS Micro System Analyzer with IR capability allows for measuring true MEMS dynamics up to 25 MHz by characterizing both in-plane and out-of-plane motions through silicon encapsulation without contact, without need for preparing nor decapping the device.
MSA IRIS measurement service
This brand new, patented measurement technology allows for comprehensive and representative analysis of Si encapsulated MEMS, measuring dynamics right through silicon caps. Our PolyXperts are looking forward to receiving your capped MEMS samples for modal testing, feasibility studies and consulting throughout all phases from development over prototyping to manufacturing of your encapsulated microstructures.
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