Testing the reliability and service life of MEMS
MEMS sensors and actuators are key functional elements in many devices and systems and, more and more often, they have safety-related functions too. Thus they have to be reliable and guaranteed throughout the system’s entire service life often under challenging operating conditions. Therefore verification of new MEMS components has to take place under exactly these conditions. Vacuum or climatic test chambers are used to simulate the pressure loading or air humidity influences and stimuli like mechanical excitation or radiation are applied. The long time function stability is verified in accelerated aging tests. Since, unlike conventional semiconductor elements, MEMS feature moving, micromechanical components as their key functional elements, the capability of measuring the dynamic, mechanical system behaviour is extremely important during reliability and service life tests.
Vibration measurements on MEMS in a vacuum chamber
Polytec’s Micro System Analyzer offers you all the relevant measuring modes for this purpose. The highly versatile measurement system can also be equipped with special lenses with large stand-off distancess to measure both static and dynamic component behavior from outside a test chamber. The influence of ambient pressure on an MEMS module’s dynamic properties is measured with the Polytec MSA, which is used either in conjunction with a vacuum chamber or in combination with a vacuum probe station for measurements at wafer level.
Microstructure characterization
Related products and service
MSA-600 Micro System Analyzer
The all-in-one optical measurement solution for static and dynamic 3D characterization of MEMS and microstructures- now for up to 8 GHz! The MSA-600 enhances microsystem development and quality inspections - also allowing testing on wafer-level when integrated into commercially available probe stations.
MSA-100-3D Micro System Analyzer
The 3D Micro System Analyzer records vibration components in all three spatial directions at once. The optical measurement system enables high-resolution 3D vibration analysis from DC up to 25 MHz with amplitude resolutions in the sub-picometer range, for both in-plane and out-of-plane vibration components.
MSA-060 Micro System Analyzer
Use the MSA-060 for entering the world of microsystem analysis. Record and visualize vibrations and dynamics of small components and microsystems with laser precision over an entire surface from DC to 24 MHz. Micro System Analyzers use measurement lasers, revealing the true dynamics of small components in a completely non-contact and non-invasive way.
MSA-650 IRIS Micro System Analyzer
The innovative and patented MSA-650 IRIS Micro System Analyzer with IR capability allows for measuring true MEMS dynamics up to 25 MHz by characterizing both in-plane and out-of-plane motions through silicon encapsulation without contact, without need for preparing nor decapping the device.
MSA IRIS measurement service
This brand new, patented measurement technology allows for comprehensive and representative analysis of Si encapsulated MEMS, measuring dynamics right through silicon caps. Our PolyXperts are looking forward to receiving your capped MEMS samples for modal testing, feasibility studies and consulting throughout all phases from development over prototyping to manufacturing of your encapsulated microstructures.
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